Designing coupled coplanar waveguide standards for on-wafer mixed-mode S-parameter measurement
1 Laboratoire national de métrologie et d’essais (LNE), 29 Avenue Roger Hennequin, 78197, Trappes Cedex, France
2 Télécom ParisTech, Université Paris-Saclay, 46 Rue Barrault, 75013, Paris, France
* Corresponding author: email@example.com
This paper presents the designing of balanced calibration standards for the use of Multimode TRL technique involving the on-wafer Vector Network Analyzer (VNA) measurement of differential devices in the frequency band up to 67 GHz. These standards are based on the coupled coplanar waveguide (CCPW) lines in the configuration “Ground-Signal-Ground-Signal-Ground” (GSGSG). The application of the Multimode TRL algorithm on the simulated mixed-mode S-parameters of an attenuator shows the possibility to correct error terms then to de-embed their effects from the device under test (DUT).
© The Authors, published by EDP Sciences, 2017
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