| Issue |
2017
18th International Congress of Metrology
|
|
|---|---|---|
| Article Number | 07009 | |
| Number of page(s) | 4 | |
| Section | SI and new electrical standards / SI et nouvelles références en électricité | |
| DOI | https://doi.org/10.1051/metrology/201707009 | |
| Published online | 18 September 2017 | |
Designing coupled coplanar waveguide standards for on-wafer mixed-mode S-parameter measurement
1 Laboratoire national de métrologie et d’essais (LNE), 29 Avenue Roger Hennequin, 78197, Trappes Cedex, France
2 Télécom ParisTech, Université Paris-Saclay, 46 Rue Barrault, 75013, Paris, France
* Corresponding author: thi-dao.bui@lne.fr
This paper presents the designing of balanced calibration standards for the use of Multimode TRL technique involving the on-wafer Vector Network Analyzer (VNA) measurement of differential devices in the frequency band up to 67 GHz. These standards are based on the coupled coplanar waveguide (CCPW) lines in the configuration “Ground-Signal-Ground-Signal-Ground” (GSGSG). The application of the Multimode TRL algorithm on the simulated mixed-mode S-parameters of an attenuator shows the possibility to correct error terms then to de-embed their effects from the device under test (DUT).
© The Authors, published by EDP Sciences, 2017
This is an Open Access article distributed under the terms of the Creative Commons Attribution License 4.0, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.