Open Access
| Numéro |
2015
17th International Congress of Metrology
|
|
|---|---|---|
| Numéro d'article | 14005 | |
| Nombre de pages | 8 | |
| Section | Nanotechnologie : mesure et caractérisation / Nanotechnology: measurement and characterisation | |
| DOI | https://doi.org/10.1051/metrology/20150014005 | |
| Publié en ligne | 21 septembre 2015 | |
- Quere D. 2008 Wetting and Roughness Annu. Rev. Mater. Res. 38 71–99 [CrossRef] [Google Scholar]
- Gogolides E. et al.. 2015 Hierarchical micro and nano structured, hydrophilic, superhydrophobic and superoleophobic surfaces incorporated in microfluidics, microarrays and lab on chip microsystems Microelectr. Eng. 132 135–155 [CrossRef] [Google Scholar]
- Ponche A. et al.. 2010 Relative influence of surface topography and surface chemistry on cell response to bone implant materials. Part 1: Physico-chemical effects Proc. IMechE Part H: J. Engineering in Medicine 224 1471–1486 [CrossRef] [Google Scholar]
- Chattopadhyay S. et al.. 2010 Anti-reflecting and photonic nanostructures Mater. Sci. and Eng. R 69 1–35 [CrossRef] [Google Scholar]
- Yacoot A. and Koenders L. 2008 Aspects of scanning force microscope probes and their effects on dimensional measurement J. Phys. D: Appl. Phys. 41 103001 (46pp) [CrossRef] [Google Scholar]
- Westra K. L. et al.. 1993 Tip artefacts in atomic force microscope imaging of thin film surfaces J. Appl.Phys. 74 3608–10 [CrossRef] [Google Scholar]
- Grutter P. et al.. 1992 Tip artefacts of microfabricated force sensors for atomic force microscopy Appl. Phys. Lett. 60 2741–3 [CrossRef] [Google Scholar]
- Villarrubia J. S. 1997 Algorithms for scanned probe microscope image simulation, surface reconstruction and tip estimation J. Res. Natl Inst Stand. Technol. 102 245–54 [CrossRef] [Google Scholar]
- Villarrubia J. S. 1996 Scanned probe tip characterization without calibrated tip characterizers J. Vac. Sci. Technol. B 12 1518–21 [CrossRef] [Google Scholar]
- Tranchida D et al.. 2006 Some experimental issues of AFM tip blind estimation: the effects of noise and resolution Meas. Sci. Technol. 17 2630–6 [CrossRef] [Google Scholar]
- Marinello F.L. et al.. 2008 Critical factors in SEM 3D stereo microscopy Meas. Sci. Technol. 19 065705 [CrossRef] [Google Scholar]
- Seeger A. and Haussecker H., 2005 Shape-from-shading and simulation of SEM images using surface slope and curvature Surf. Interface Anal. 37 927–938 [CrossRef] [Google Scholar]
- Foucher J. 2011 Hybrid CD Metrology Concept compatible with high volume manufacturing Metrology, Inspection, and Process Control for Microlithography XXV, Proc. SPIE 7971 [Google Scholar]
- Vaid, A. et al.. 2011 A holistic metrology approach: hybrid metrology utilizing scatterometry, CD-AFM, and CDSEM Metrology, Inspection, and Process Control for Microlithography XXV, Proc. SPIE 7971 [Google Scholar]
- Vaid, A. et al.. 2014 Hybrid metrology: from the lab into the fab J. Micro/Nanolith. MEMS MOEMS. 13 041410 [CrossRef] [Google Scholar]
- Rana N. et al.. 2014 Leveraging advanced data analytics, machine learning, and metrology models to enable critical dimension metrology solutions for advanced integrated circuit nodes J. Micro/Nanolith. MEMS MOEMS. 13 041415 [CrossRef] [Google Scholar]
- Hu Y.Z. and Tonder K. 1992 Simulation οf 3-D Random Rough Surface By 2-D Digital Filter and Fourier Analysis Int. J. Mach. Tools Manufact. 32 83–90 [Google Scholar]
- Mack C.A. 2013 Generating random rough edges, surfaces, and volumes Applied Optics 52 1472–1481 [CrossRef] [PubMed] [Google Scholar]