201316th International Congress of Metrology
|Number of page(s)||6|
|Section||Les avancées en mesure 3D et Dimensionnel / Advanced coordinate metrology & Dimensional|
|Published online||07 October 2013|
Comparison of nanoparticle diameter measurements by Atomic Force Microscopy and Scanning Electron Microscopy
1 LNE, DMSI, Pôle de Recherche de Métrologie, avancée- 29, avenue Roger Hennequin, 79197, Trappes Cedex, France
2 Mines ParisTech, centre des matériaux, Z.I, Les Glaizes - 5, rue Léon Blum, 91120, Palaiseau, France
a Corresponding author: email@example.com
Using combined AFM ( Atomic Force Microscope) and a SEM (Scanning Electron Microscope) makes it possible to accurately measure a nano-object in 3 dimensions. This paper deals with the traceable measurements of the size and the size distribution of a SiO2 spherical shaped nanoparticle population performed by both microscopy techniques. The complementary nature of AFM and SEM is investigated. The construction of size distribution histogram was carried out by means of a homemade program described here. This semi-automatic program is capable of counting only isolated nanoparticles and eliminating measurement artefacts and aggregates. Finally, a comparison between both measurement types is proposed.
© Owned by the authors, published by EDP Sciences, 2013
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