Mesure de température et de flux de chaleur à base de couches minces ou épaisses: atouts, fabrication et applications

Laboratoire de Thermocinétique, UMR CNRS 6607, Polytech’Nantes, 44306 Nantes cdx 3, France

^a bertrand.garnier@univ-nantes.fr

Abstract

Temperature measurements on surfaces or inside mediums are often performed using resistance temperature detectors (RTD) or thermocouple wires. The wire thermocouples are preferred for transient measurement because they are relatively less intrusive than other types of sensors and have low response times until a few tens of milliseconds. The smallest diameters of thermocouple wires are of the order of 12 μm, however with such a size they are very difficult to implement. In addition, there are many situations in which theirs dimensions are still too large as in microsystems such as OLED, organic solar cell, hybrid thermoelectric devices and also microsensors.... Thus, it is very advantageous to use temperature sensors as thin films where the thickness is typically of the order of 100nm and also thick film (on the order of a few micrometers) . In this communication, we present successively: i) the advantages and characteristics of thermal metrology using thin or thick films, ii) their design and manufacturing, iii) the specificities of thin film thermocouples and resistance thermometers and finally various examples of achievement.