Open Access
| Issue |
2015
17th International Congress of Metrology
|
|
|---|---|---|
| Article Number | 14007 | |
| Number of page(s) | 4 | |
| Section | Nanotechnologie : mesure et caractérisation / Nanotechnology: measurement and characterisation | |
| DOI | https://doi.org/10.1051/metrology/20150014007 | |
| Published online | 21 September 2015 | |
- S. Ducourtieux, B. Poyet, Development of a metrological atomic force microscope with minimized Abbe error and differential interferometer-based real-time position control, Measurement Science and Technology 22(9):094010 (2011) [CrossRef] [Google Scholar]
- Y. Boukellal, S. Ducourtieux, B. Poyet, Improvement of the LNE’s metrological Atomic Force Microscope (mAFM) performance: Design of new mAFM head dedicated for nanometrology applications, 16th International Congress of Metrology 06008 (2013) [Google Scholar]
- JCGM-WG1 101, Evaluation of measurement data - Supplement 1 to the “Guide to the expression of uncertainty in measurement” - Propagation of distributions using a Monte Carlo method, ISO/IEC Guide 98-3-1 (2008) [Google Scholar]
- JCGM 100, Evaluation of measurement data - Guide to the expression of uncertainty in measurement, ISO/IEC Guide 98–3 (2008) [Google Scholar]
- G. Binnig, C. F. Quate, C. Gerber, Atomic Force Microscope, Phys. Rev. Lett. 56(9):930–3 [Google Scholar]
- Surface chemical analysis — Scanning-probe microscopy — Determination of geometric quantities using SPM: Calibration of measuring systems. ISO 11952: 2014 [Google Scholar]
- F. Meli, R. Thalmann, Long-range AFM profiler used for accurate pitch measurements, Meas Sci Technol 9(7):1087 (1998) [Google Scholar]
- H. U. Danzebrink, L. Koenders, G. Wilkening, A. Yacoot, H. Kunzmann, Advances in Scanning Force Microscopy for Dimensional Metrology, CIRP Ann. Manuf. Technol. 55(2):841–78 (2006) [Google Scholar]