Open Access
Issue
2013
16th International Congress of Metrology
Article Number 06008
Number of page(s) 4
Section Les avancées en mesure 3D et Dimensionnel / Advanced coordinate metrology & Dimensional
DOI https://doi.org/10.1051/metrology/201306008
Published online 07 October 2013
  • S. Ducourtieux and B. Poyet, Meas. Sci. Technol. 22 (2011) 094010 [CrossRef]
  • B.. Poyet, 2010, Conception d’un microscope à force atomique métrologique PhD Thesis Université de Versailles Saint-Quentin en Yvelines
  • Kwon J, Hong J., Kim Y S., Lee D Y., Lee K., Lee S M. and Park S. 2003 Atomic force microscope with improved scan accuracy, scan speed, and optical vision Rev. Sci. Instrum. 74 4378–83 [CrossRef]
  • G. Binnig, C.F. Quate and Ch. Gerber, Phys. Rev.Lett 56(1986)930 [CrossRef] [PubMed]
  • T.J. Witt, Instrumentation and Measurement, IEEE Transactions (April 2001), 50 (2), pg. 445–448