| Numéro |
2013
16th International Congress of Metrology
|
|
|---|---|---|
| Numéro d'article | 13003 | |
| Nombre de pages | 4 | |
| Section | Nanotechnologies / Nanotechnology | |
| DOI | https://doi.org/10.1051/metrology/201313003 | |
| Publié en ligne | 7 octobre 2013 | |
Characterization of epitaxial and CVD graphene with double metal-graphene contacts for gas sensing
1 Department of Micro and Nanosciences, Aalto University, Micronova, Tietotie 3, 02015, Espoo, Finland
2 Jyväskylä University, Seminaarinkatu 15, 40014, Jyväskylä, Finland
3 Finnish Meteorological Institute, Erik Palmenin aukio 1, P.O. Box 503, 00101, Helsinki, Finland
4 MIKES, Tekniikantie 1, P.O.Box 9, FI-02151 Espoo, Finland.
a Corresponding author: sergey.novikov@aalto.fi
Graphene is the promising material for the gas sensing application. High sensitivity to the nitrogen dioxide and ozone allows application of the simple graphene based devices for the environmental monitoring. The aims of the work were the fabrication of reliable graphene devices and the comparison of epitaxial and CVD-based graphene sensors for their sensing abilities. In order to increase sensitivity and reliability of graphene sensors the optimization of fabrication technology as well as operation parameters was done. Results demonstrated ultra high sensitivity of the fabricated epitaxial sensors upon exposure to NO2 and ozone gases.
© Owned by the authors, published by EDP Sciences, 2013
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