International Congress of Metrology

Model-aided hybrid metrology for surface roughness measurement fusing AFM and SEM data

Vassilios Constantoudis, George Boulousis, Kosmas Ellinas and Evangelos Gogolides

Published online: 21 September 2015

DOI: 10.1051/metrology/20150014005

Vassilios Constantoudis

George Boulousis

Kosmas Ellinas

Evangelos Gogolides

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