International Congress of Metrology

Estimation of the measurement uncertainty of LNE’s metrological Atomic Force Microscope using virtual instrument modeling and Monte Carlo Method

Paul Ceria, Sebastien Ducourtieux and Younes Boukellal

Published online: 21 September 2015

DOI: 10.1051/metrology/20150014007

Paul Ceria

Sebastien Ducourtieux

Younes Boukellal

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