International Congress of Metrology

Improvement of the LNE’s metrological Atomic Force Microscope (mAFM) performance: Design of new mAFM head dedicated for nanometrology applications

Younes Boukellal, Sébastien Ducourtieux and Benoit Poyet

Published online: 07 October 2013

DOI: 10.1051/metrology/201306008

Younes Boukellal

Sébastien Ducourtieux

Benoit Poyet

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